Patterned silica films using microphase separation of a block copolymer
نویسندگان
چکیده
منابع مشابه
Fabrication of Nanodots Using Microphase Separation of Block Copolymer
Silicon microchips have continued to grow progressively smallerto meet the demands of a competitive market. The next step indevelopment will send the chips from micro-order to nano-order,giving rise to new and challenging complications. Here, twomethods are explored to develop such technology. The firstinvolves molecular beam epitaxial (MBE) growth of isotopicallycon...
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ژورنال
عنوان ژورنال: APL Materials
سال: 2014
ISSN: 2166-532X
DOI: 10.1063/1.4899155